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Auto Calibration

After the Capture Calibration routine is completed, the user measures surface features contained within each image and enters their dimensions into the software. The software compares its estimates with the actual (user-entered) dimensions to make final corrections. This portion of calibration is carried out using the Calibrate > Scanner > Auto Calibration... command.

The system will prompt the user to select the calibration image:

  1. Click OK.
  1. Select any of the desired captured calibration images and click Open.

  1. The system will open a user interface:

In the right upper Input panel, set those you wish to calibrate to Yes and those you wish to skip to No. For normal calibration, verify that all parameters are selected.

  1. Click the Calibrate button to start the calibration.
  1. Depending on what Inputs are selected in Step 3, the software will sequentially present various calibration images. You will be asked to draw either a vertical or horizontal line on those images:

The software displays the span of that drawn line initially in the New Distance field (e.g. 105 μm in the upper image) and in the Results / Distance /Value field. This value is the software’s estimate of the length of the line based on the current calibration values. Input the known value (e.g. 100 μm the upper image) in the New Distance field to reflect the correct line length.

  1. Click the Apply button. The software will finish this image and continue to the next image.
NOTE: When using the mouse to draw a line on the image, draw it to span as many features as possible, connecting similar edges (as in the images above). Measure features without regard to how they appear in the calibration images. Features may be represented with stretched, distorted, or angled appearances due to the unusual movements employed during capture calibration scanning. Regardless, features are separated by the same spacing.
  1. Continue drawing lines and entering measured distances until all capture calibration images are measured. When the software is finished, it will prompt the user that it is done.
  2. Click OK.
  3. The software prompts the user that “The current workspace must be closed. Would you like to save and reload the current workspace.” Click either Yes or No. The software will then close the current workspace and start a new one for the newly calibrated parameters to take effect.

If the Capture Calibration and Auto Calibration routines are completed correctly, the SPM will be calibrated within 1–2 percent accuracy over most of the scanner’s measuring range. To obtain still better accuracy, the SPM can be fine-tuned to obtain maximum measurement accuracy (see Fine-tuning for XY Calibration).

 

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